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Commercialization

Several technologies developed by the MNTR group are available for commercialization. In addition to this website, information can be found at the website of the UIUC Office of Technology Management.

• Related Campus Sites
• Patents
• Available technologies

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Related Campus Sites

• MEMS Computer Aided Design
  The MEMS CAD project focused on designing simulation tools for silicon etching and micro RF components.
  

• ACES Project Website

• Integrated Micro Devices Corporation commercializes certain technologies developed by the MNTR Group.

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Patents

1. Y. Yi and C. Liu, "A Method for Assembly of Microelectromechanical Systems Using Magnetic Actuation" US Patent No 6,166,478 issued December 26, 2000

2. C. Liu, J. Zou, "Wide Tuning Range Variable MEMS Capacitor," US Patent No 6,418,006 issued July 9, 2002

3. C. Liu, M. Zhang, and D. A. Bullen, "Parallel, Individually Addressable Probes for Nanolithography" US Patent No 6,642,129 issued November 4, 2003

4. C. Liu, "Sensor for Monitoring Material Deposition and Method of Monitoring Material Deposition" US Patent No 6,884,458 issued April 26, 2005

5. J. Zou, C. Liu, J. Schutt-Aine, "Raised On-Chip Inductor and Method of Manufacturing Same," US Patent No 6,922,127 issued July 26, 2005

6. C. Liu and J. Chen, "Microscale Out-of-Plane Anemometer" US Patent No. 6,923,054 issued August 2, 2005

7. Chang Liu, Jun Zou, Xuefeng Wang, David Bullen, "Scanning probe microscopy probes and methods," US Patent 7,081,624 issued July 25, 2006.

8. J. G. Eden, S. Park, J. Chen, C. Liu, “Microdischarge Devices and Arrays Having Tapered Microcavities”, US Patent 7,112,918 issued September 26, 2006.

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Available Technologies

 

PDMA assembly methods for high-density vertical coil inductors

 

Parylene CVD thickness sensors