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Tuesday, July 08, 2008
Publications and Conference Presentations
| 2006 | 2005 | 2004 | 2003 | 2002 | 2001 | 2000 | 1999 | 1998 | 1997 | 1996 | 1995 | 1994 |
For links to these journals and many more jump to our links page.
Adobe Acrobat reader can be downloaded from the Acrobat download website.
indicates papers available for download
indicates papers that have been accepted for publication or presentation in the near future
indicates papers that have not been posted yet
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MNTR Group endnote library | |
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| 2007 | ||
| 188 |
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Jonathan Engel, and Chang Liu, "Design Rules for Enhancing Strain Sensitivity of Metal Strain Gauges on Microfabricated Polymer Structures", Applied Physics Letters. accepted |
| 187 |
|
Yingchen
Yang, Nannan Chen, Craig Tucker, Jonathan Engel, Saunvit Pandya, and
Chang Liu, "From Artificial Haircell Sensor
to Artificial Lateral Line System: Development and Application",
MEMS 2007 – 20th IEEE International Conference on Micro Electro
Mechanical Systems, Kobe, Japan, January 21 – 25, 2007. accepted
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| 2006 | ||
| 186 |
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Yingchen Yang, Nannan Chen, Jonathan Engel, Craig Tucker, Saunvit Pandya, and Chang Liu, "MEMS Based Flow Sensors and their Application on Flow Measurements", 59th Annual Meeting of the Division of Fluid Dynamics of the American Physical Society, Tampa Bay, FL, November 19-21, 2006. |
| 185 |
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Yingchen Yang, Jack Chen, Jonathan Engel, Saunvit Pandya, Nannan Chen, Craig Tucker, Sheryl Coombs, Douglas L. Jones, and Chang Liu, "Distant Touch Hydrodynamic Imaging with an Artificial Lateral Line", The Proceedings of the National Academy of Sciences, Vol. 103, No. 50, pp. 18891-18895, 2006. |
| 184 |
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Shifeng Li and Chang Liu, "MEMS Arrayed Scanning Probes for Soft Nanolithography", Electrochemical Society Transactions, 3(10), pp. 463-472, 2006. |
| 183 |
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C. Liu, J. Engel and K. Shaikh, "Nano composite conductive elastomer for soft MEMS applications: materials, process, and devices," Nanotechnology General Session, Joint International Conference of the ECS Society, Oct 29-Nov 3, 2006, Cancun, MX. |
| 182 |
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Li, S., Wang, Q., Goluch, E. D., and Liu, C. "Arrayed Multifunctional Scanning Probes for Soft Nanolithography and Direct Writing of Bio Arrays," International Conference on Bio-Nano-Informatics Fusion 2006 & International Forum on Biochip Technologies 2006, Beijing, China, October 9-12, 2006. |
| 181 |
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Craig Tucker, Nannan Chen, Jonathan Engel, Yingchen Yang, Saunvit Pandya, and Chang Liu, "High-Sensitivity Bi-Directional Flow Sensor Based on Biological Inspiration of Animal Haircell Sensors" IEEE Sensors Conference, Korea, October 2006 |
| 180 |
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Jonathan Engel, Nannan Chen, Craig Tucker, Chang Liu, Sung-Hoon Kim, and Douglas Jones, “Flexible Multimodal Tactile Sensing System for Object Identification” IEEE Sensors Conference, Korea, October 2006. |
| 179 |
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Jonathan Engel, Jack Chen, Chang Liu, and David Bullen, “Polyurethane Rubber All-Polymer Artificial Hair Cell Sensor”, IEEE/ASME Journal of MEMS, 2006. accepted |
| 178 | |
Sergey Rozhok, Zhifang Fan, Chang Liu, Chad A. Mirkin, and Richard C. Holz, "Fabrication of Motile Bacterial Cells in a Pre-aligned Holed Microarray" Langmuir, accepted. |
| 177 | |
Khalid Salaita, Yuhuang Wang, Joseph Fragala, Rafael A. Vega, Chang Liu, and Chad A. Mirkin, "Massively Parallel Dip-Pen Nanolithography with 55,000-Pen Two Dimensional Arrays", Angewandte Chemie, accepted. |
| 176 |
|
Edgar D. Goluch, Jwa-Min Nam, Dimitra G. Georganopoulou, Thomas N. Chiesl, Kashan A.
Shaikh, Kee S. Ryu, Annelise E. Barron, Chad Mirkin
and Chang Liu, "A Bio-Barcode Assay for
On-Chip Attomolar-Sensitivity Protein Detection," Lab. Chip.
Vol. 6, pp. 1293-1299, 2006. |
| 175 |
|
Thomas N. Chiesl, Karl. W. Putz, Meena Babu, Patrick Mathias, Kashan A. Shaikh, Edgar D. Goluch, Chang Liu, and Annelise Barron, "Self-Associating Block Copolymer Networks for Microchip Electrophoresis Provides Enhanced DNA Separation via "Inchworm" Chain Dynamics" Analytical Chemistry, 78(13), pp. 4406-4415, 2006. |
| 174 |
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Shifeng Li, Kashan A Shaikh, Sandra Szegedi, Edgar Goluch and Chang Liu, "
Micromachined Inking Chip for Scanning Probe Nanolithography Using Local
Thermal Vapor Inking Method", Applied Physics Letters,
89, 173125 2006.
(Selected for the November 6, 2006 issue of Virtual Journal of Nanoscale Science & Technology, AIP/APS, http://www.vjnano.org) |
| 173 |
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Shifeng Li, and Chang Liu, "MEMS arrayed scanning probes for soft nanolithography", Electrochemical Society Transactions, Volume 3, MEMS/NEMS 7, October 29-November 3, Cancun, Mexico |
| 172 | |
Qin Wang, Shifeng Li, Chang Liu, and Graciela W. Padua, "Zein Self-Assembly on Nano- and Micro- Patterned Hybrid Surfaces", The American Institute of Chemical Engineers (AIChE) 2006 Annual Meeting, November 12-17, San Francisco, CA, accepted |
| 171 | |
Yingchen Yang, Saunvit Pandya, Jack Chen, Jonathan Engel, Nannan Chen, and Chang Liu, "Micromachined Hot-Wire Boundary Layer Flow Imaging Array", CANEUS 2006, August 27 - September 1, 2006, Toulouse, France. |
| 170 | |
Saunvit Pandya, Yingchen Yang, Douglas Jones, Jonathan Engel, and Chang Liu ,"Multisensor Processing Algorithms for Underwater Dipole Localization and Tracking using MEMS Artificial Lateral Line Sensors", EURASIP Journal on Applied Signal Processing, accepted. |
| 169 | |
Shifeng Li, Xuefeng Wang and Chang Liu, "Multifunctional Probe Array and Local Vapor Inking Chip for Scanning Probe Nanolithography", IEEE-Nano2006, Cincinnati-Ohio, July 17-20, 2006 |
| 168 | |
Nannan Chen, Jack Chen, Jonathan Engel, Saunvit Pandya, Craig Tucker and Chang Liu, "Development and Characterization of High Sensitivity Bioinspired Artificial Haircell Sensor", The 12th Solid State Sensors, Actuator, and Microsystems Workshop (Hilton Head 2006), Hilton Head Island, SC, June 4 - 8, 2006. |
| 167 | |
Shifeng Li, Kashan A Shaikh, Sandra Szegedi, Edgar Goluch and Chang Liu, "A Novel Micromachined Inking Chip for Scanning Probe Nanolithography Using Local Vapor Inking Method", The 12th Solid State Sensors, Actuator, and Microsystems Workshop (Hilton Head 2006), Hilton Head Island, SC, June 4 - 8, 2006. Accepted |
| 166 | |
Jonathan M. Engel, Nannan Chen, Kee Ryu, Saunvit Pandya, Craig Tucker, Yingchen Yang, and Chang Liu, "Multi-Layer Embedment of Conductive and Non-Conductive PDMS for All-Elastomer MEMS," The 12th Solid State Sensors, Actuator, and Microsystems Workshop (Hilton Head 2006), Hilton Head Island, SC, June 4 - 8, 2006. Accepted |
| 165 |
|
Tim K. Hossain, I. Adesida, C. Liu, "Fabrication of Suspended Micromechanical Structures from Bulk 6H-SiC using ICP-RIE System," Journal of Micromechanics and Microengineering, 16 No 4 (April 2006) 751-756 |
| 164 | |
Chang Liu, Jonathan Engel, Jack Chen, Nannan Chen, Saunvit Pandya, Yingchen Yang, Craig Tucker, Sheryl Coombs, Joseph Humphrey, and Horst Bleckmann, "Polymer Micro and Nano Scale Fabrication Technology Development for Bioinspired Sensing," IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Zhuhai, China, January 18-21, 2006 |
| 163 |
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Kee Suk Ryu, Kashan Shaikh, Edgar Goluch, and Chang Liu, "A Two-Terminal Longitudinal Hotwire Sensor for Monitoring the Position and Speed of Advancing Liquid Fronts in Microfluidic Channels," Applied Physics Letters, Accepted Selected for the March 20, 2006 issue of Virtual Journal of Nanoscale Science & Technology |
| 162 | |
N. Chen, J. Engel, S. Pandya, and C. Liu, "Flexible Skin With Two-axis Bending Capability Made Using Weaving by Lithography Fabrication Method," MEMS 2006 Conference, Istanbul, Turkey , January 22 - 26, 2006 |
| 161 | |
Jack Chen, Jonathan Engel, Nannan Chen, Saunvit Pandya, Sheryl Coombs, and Chang Liu, "Artificial Lateral Line and Hydrodynamic Object Tracking," MEMS 2006 Conference, Istanbul, Turkey , January 22 - 26, 2006 |
| 160 | |
E. D. Goluch, S. I. Savka, D. G. Georganopoulou, J. M. Nam, K. A. Shaikh, K. S. Ryu, T. N. Chiesl, A. E. Barron, C. A. Mirkin, and C. Liu, "Chip-Based High-Sensitivity Detection of Multiple Disease Biomarkers," MEMS 2006 Conference, Istanbul, Turkey , January 22 - 26, 2006 |
| 159 | |
Jonathan Engel, Jack Chen, Nannan Chen, Saunvit Pandya, and Chang Liu, "Multi-Walled Carbon Nanotube Filled Conductive Elastomers: Materials and Application to Micro Transducers," MEMS 2006 Conference, Istanbul, Turkey , January 22 - 26, 2006 |
| 158 | |
D. Bullen and C. Liu, "Electrostatically Actuated Dip Pen Nanolithography Probe Arrays," Sensors and Actuators A: Physical, Vol. 125, No. 2, pp. 504-11, 10 January 2006. |
| 2005 | ||
| 157 | |
X. Wang and C. Liu, Multifunctional Probe Array for Nano Patterning and Imaging," Nano Letters, vol. 5, no. 10, pp. 1867-1872, Oct 2005. |
| 156 | |
K. Salaita, S. Lee, X. Wang, L. Huang, T. Dellinger, C. Liu, and C. Mirkin, "Sub-100 nm, Centimeter-Scale, Parallel Dip-Pen Nanolithography," Small 2005, 1 No. 10, pp 940-945. |
| 155 | |
X. Wang, L. Vincent, D. Bullen, J. Zou, and C. Liu, "Scanning Probe Lithography Tips with Spring-on-Tip Designs: Analysis, Fabrication, and Testing," Applied Physics Letters, vol. 87, no. 5, p. 054102, Aug 2005. (Selected for the August 8, 2005 issue of Virtual Journal of Nanoscale Science & Technology, AIP/APS, http://www.vjnano.org) |
| 154 | |
Jonathan Engel, Jack Chen, Nannan Chen, Chang Liu, "Development and Characterization of an Artificial Hair Cell Based on Polyurethane Elastomer and Force Sensitive Resistors," The 4th IEEE International Conference on Sensors, Irvine, California, 31 Oct- 1 Nov, 2005. |
| 153 | |
Nannan Chen, Jonathan Engel, Jack Chen, Zhifang Fan, Chang Liu, "Micromachined Thermal Imaging Mesh for Conformal Sensing System," The 4th IEEE International Conference on Sensors, Irvine, California, 31 Oct- 1 Nov, 2005. |
| 152 | |
Saunvit Pandya, Jonathan Engel, Jack Chen, Zhifang Fan, and Chang Liu, "CORAL: Miniature Acoustic Communication Subsystem Architecture for Underwater Wireless Sensor Networks," The 4th IEEE International Conference on Sensors, Irvine, California, 31 Oct - 1 Nov, 2005. |
| 151 | |
K. Ryu, K. Shaikh, E. Goluch, P. Mathias, and C. Liu, "Two-Terminal Longitudinal Hotwire Sensor for In-Line Monitoring of Sub-Nanoliter Volume in Microfluidic Channels," The 4th IEEE International Conference on Sensors, Irvine, California, 31 Oct - 1 Nov, 2005. |
| 150 | |
E. Goluch, D. Georganopoulou, S. Stoeva, J.-M. Nam K. Shaikh, K. Ryu, T. Chiesl, A. Barron, C. Mirkin and C. Liu, "Development and Optimization of a Lab-on-a-chip Device for Multiplexed Ultra-Sensitive Detection of Proteins," The American Institute of Chemical Engineers (AIChE) 2005 Annual Meeting, Cincinnati, OH USA, October 30 - November 4, 2005. |
| 149 | |
E. Goluch, D. Georganopoulou, S. Stoeva, J.-M. Nam, K. Shaikh, K. Ryu, T. Chiesl, A. Barron, C. Mirkin and C. Liu, "Optimization of a Microfluidic Chip for the Biobarcode Assay," The Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2005), Boston, Massachusetts , 9 - 13 Oct 2005. |
| 148 | |
E. Goluch, K. Shaikh, K. Ryu, J. Chen, J. Engel, and C. Liu, "Deposition and Patterning of Thin-Film Materials on Curved Surfaces using Microfluidic Methods," The Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2005), Boston , Massachusetts , 9-13 Oct 2005. |
| 147 | |
K. Ryu, X. Wang, K. Shaikh, E. Goluch, P. Mathias, and C. Liu, "Design And Prototyping Of A Surface Micromachined Parylene Microvalve with Hybrid Actuation Scheme: On-Chip Thermopneumatic Initiation and Electrostatic Latching," The Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2005), Boston, Massachusetts, 9-13 Oct 2005. |
| 146 | |
K. Ryu, K. Shaikh, E. Goluch, P. Mathias, and C. Liu, "A Simple Two Terminal Longitudinal Hotwire Sensor for Monitoring the Position and Speed of Advancing Liquid Fronts In Micro Channels," The Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2005), Boston, Massachusetts, 9-13 Oct 2005. |
| 145 | |
Kashan A. Shaikh, Kee Suk Ryu, Edgar D. Goluch, Jwa-Min Nam, Juewen Liu, Yi Lu, Chad A. Mirkin, Chang Liu, "A Methodology for Rapid Prototyping Microfluidic Devices with Sophisticated Functionality," The Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2005), Boston, MA, USA, October 9-13, 2005. |
| 144 | |
Kashan A. Shaikh, Kee Suk Ryu, Edgar D. Goluch, Jwa-Min Nam, Juewen Liu, C. Shad Thaxton, Thomas N. Chiesl, Annelise E. Barron, Yi Lu, Chad A. Mirkin, Chang Liu, "A Modular Microfluidic Architecture for Integrated Biochemical Analysis," PNAS, vol. 102, no. 28, pp. 9745-9750, July 2005. |
| 143 | |
S. Lee, W. Sutomo, C. Liu and E. Loth, "Micro-fabricated electrolytic micro-bubblers" International Journal of Multiphase flow, vol. 31, no. 6, pp 706-722, June 2005. |
| 142 | |
Surya Musunuri, Patrick Chapman, Jun Zou and Chang Liu, "Design Issues for Monolithic DC-DC Converters" IEEE Transactions on Power Electronics, vol. 20, no. 3, pp 639-649, May 2005. |
| 141 | |
Xuefeng (Danny) Wang, Jun Zou, David Bullen, Timothy Dellinger, Kee Ryu and Chang Liu, "MEMS for Nanotechnology Applications - Nanopatterning and Nanomanipulation," China International Conference on Nanoscience & Technology (ChinaNANO2005), Beijing, China, June 9-11, 2005. |
| 140 | |
Lee, S., Loth, E., and Liu, C. "Micro-bubbles generated on electrolytic arrays and matrices and released in a water channel," Experiments in Fluids, Vol. 38, No. 5, pp. 672-682, May 2005. |
| 139 | |
Chang Liu, "Progress in MEMS and Micro Systems Research," IMAPS/ACerS 1st International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT), Baltimore Marriott Waterfront Hotel, Baltimore, MD, USA, April 10-13, 2005. |
| 138 | |
Sung-Hoon Kim, Jonathan Engel, Chang Liu, and Douglas L. Jones, "Texture classification using a polymer-based MEMS tactile sensor" Journal of Micromechanics and Microengineering, 15 (2005) 912–920. |
| 137 | |
Rozhok, Sergey; Kwang-Fu Shen, Clifton; Littler, Pey-Lih Ho; Fan, Zhifang; Liu, Chang; Mirkin, Chad A.; Holz, Richard C. "Methods for Fabricating Microarrays of Motile Bacteria" Small, 2005, Volume 1, No. 4, pp. 439-444, January 2005. |
| 136 | |
J. Engel, J. Chen, D. Bullen, and C. Liu, "Polyurethane Rubber as a MEMS Material: Characterization and Demonstration of an All-Polymer Two-Axis Artificial Haircell Flow Sensor," 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005, Miami Beach, FL USA, January 2005. |
| 135 | |
J. Chen, J. Engel, N. Chen, and C. Liu, "A Monolithic Integrated Array of Out-of-Plane Hot-Wire Flow Sensors and Demonstration of Boundary-Layer Flow Imaging," 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005, Miami Beach, FL USA, January 2005. |
| 134 | |
J. Engel, J. Chen, Z. Fan, and C. Liu, "Polymer Micromachined Multimodal Tactile Sensors," Sensors and Actuators A: Physical, vol. 117, no. 1, pp. 50-61, January 3, 2005. |
| 2004 | ||
| 133 | |
K. Ryu, K. Shaikh, E. Goluch, Z. Fan, C. Liu, "Micro Magnetic Stir-bar Mixer Integrated with Parylene Microfluidic Channels," The Royal Society of Chemistry (RSC) Journal of Lab on a Chip, vol. 4, no. 6, pp. 608-613, November 29, 2004. |
| 132 | |
S.-J. Park, J.G. Eden, J. Chen, C. Liu, "Microdischarge devices with 10 or 30 mm square silicon cathode cavities: pdscaling and production of the XeO excimer," Applied Physics Letters, vol. 85, no. 21, p. 4869-4871, November 22, 2004. |
| 131 | |
E. Goluch, J.-M. Nam, T. Chiesl, K. Shaikh, K. Ryu, A. Barron, C. Mirkin, C. Liu, "A Microfluidic Chip for Bio-Bar-Code-Based Detection of Proteins," The American Institute of Chemical Engineers (AIChE) 2004 Annual Meeting, Austin, TX USA, November 7-12, 2004. |
| 130 | |
E. Goluch, K. Shaikh, K. Ryu, J. Chen, J. Engel, C. Liu, "A Microfluidic Method for Sensor Fabrication on Curved Surfaces," The American Institute of Chemical Engineers (AIChE) 2004 Annual Meeting, Austin, TX USA, November 7-12, 2004. |
| 129 | |
X.Wang, D. Bullen, J. Zou, C. Liu, and C. Mirkin, "A Thermally Actuated Probe Array For Parallel Dip Pen Nanolithography," Journal of Vacuum Science and Technology B, vol. 22, no. 6, pp. 2563-2567, October 25. |
| 128 | |
E. Goluch, K. Shaikh, K. Ryu, J. Chen, J. Engel, C. Liu, "A Microfluidic Method for In-Situ Deposition and Precision Patterning of Thin-Film Metal on Curved Surfaces," Applied Physics Letters, vol. 85, no. 16, pp. 3629-3631, October 18, 2004. |
| 127 | |
E. Goluch, J.-M. Nam, T. Chiesl, K. Shaikh, K. Ryu, A. Barron, C. Mirkin, C. Liu, "A Microfluidic Device Using Nanoparticle-Based Bio-Barcodes for Ultra-Sensitive Detection of Protein," The 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS 2004), Malmo, Sweden, September 26-30, 2004. |
| 126 | |
J. Chen, J. Engel, M. Chang, and C. Liu, "3D out-of-plane flow sensor array with integrated circuits," Eurosensors XVI, Rome 2004. |
| 125 | |
Chang Liu, "Micro machined tools for nano patterning," 2004 Gordon Research Conference on Nanostructure Fabrication, Tilton, NH, July 18-23, 2004. |
| 124 | |
J. Engel, Z. Fan, L. Zhao, J. Chen, and C. Liu, "Smart Brick - A Low Cost, Modular Wireless Sensor For Civil Structure Monitoring," International Conference on Computing, Communications and Control Technologies (CCCT 2004), Austin, TX USA, August 14-17, 2004. |
| 123 | |
K. Ryu, X. Wang, K. Shaikh and C. Liu, "A Method for Precision Patterning of Silcone Elastomer and Its Applications," IEEE/ASME Journal of Microelectromechanical Systems, vol. 13, no. 4, pp. 568-575, August 2004. |
| 122 | |
D. Bullen, X. Wang, J. Zou, S-W Chung, C. A. Mirkin, C. Liu, "Design, Fabrication, and Characterization of Thermally Actuated Probe Arrays for Dip Pen Nanolithography," IEEE/ASME Journal of Microelectromechanical Systems, vol. 13, no. 4, pp. 594-602, August 2004. |
| 121 | (448 kb) |
K. Ryu, X. Wang, K. Shaikh, D. Bullen, E. Goluch, J. Zou, C. Liu and C. Mirkin, "Integrated Microfluidic Inking Chip for Scanning Probe Nanolithography," Applied Physics Letters, vol. 85, no. 1, page 136-138, 5 July 2004. |
| 120 | (1017 kb) |
Chang Liu, "Towards High Throughput, Low Cost Dip Pen Nanolithography Systems," DARPA Workshop on Bridging Direct Write Technology Dimensions, June 27 – July 1, Hotel Edgewater, Seward, Alaska, 2004. |
| 119 | (529 kb) |
K. Ryu, X. Wang, K. Shaikh, E. Goluch, D. Bullen, J. Zou, C. Liu, "An Integrated Microfluidic Inking Chip for SPM Nanolithography," The 11th Solid State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2004), pp. 99-100, Hilton Head Island, SC, 6-10 June 2004. |
| 118 | (543 kb) |
Z. Fan, J. M. Engel, J. Chen, and C. Liu, "Parylene Surface-Micromachined Membranes for Sensor Applications," Microelectromechanical Systems, Journal of, vol. 13, pp. 484-490, 2004. |
| 117 | (320 kb) |
Jinghong Chen, S.-M. Kang, J. Zou, C. Liu, and J. E. Schutt-Aine, "Reduced-Order Modeling of Weakly Nonlinear MEMS Devices With Taylor-Series Expansion and Arnoldi Approach," Microelectromechanical Systems, Journal of, vol. 13, pp. 441-451, 2004. |
| 116 | |
C. Liu, J. Chen, J. Engel, and Z. Fan, "Biomimetic micro sensors based on polymer micromachining," presented at The 227th National Meeting of the American Chemical Society (ACS), Anaheim, CA, 2004. |
| 115 | (1074 kb) |
J. Zou, X. Wang, D. Bullen, K. Ryu, C. Liu, and C. A. Mirkin, "A mould-and-transfer technology for fabricating scanning probe microscopy probes," Journal of Micromechanics and Microengineering, Vol. 14, No. 2, pp. 204-211, February 2004. |
| 114 | (132 kb) |
D. Bullen, S-W. Chung, X. Wang, J. Zou, C. Mirkin, C. Liu, "Parallel dip pen nanolithography with arrays of individually addressable cantilevers," Applied Physics Letters, Vol. 84, No. 5, pp. 789-791, 2 Feb 2004. |
| 113 | (802 kb) |
X. Wang, L. Vincent, M. Yu, Y. Huang, and C. Liu, "A Thermally Actuated Three-Probe Nanomanipulator For Efficient Handling of Individual Nanostructures," 17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004, Maastricht, Netherlands, pp. 442-445, 25-29 January 2004. |
| 2003 | ||
| 112 | (1651 kb) |
J. Chen and C. Liu, "Development and Characterization of Surface Micromachined, Out-Of-Plane Hot-Wire Anemometer," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 12, No. 6, pp. 979-988, Dec 2003. |
| 111 | (526 kb) |
S. Musunuri, P. L. Chapman, J. Zou, and C. Liu, "Inductor Design for Monolithic DC-DC Convertors," IEEE 34th Annual Conference on Power Electronics Specialists (PESC '03), Acapulco, Mexico, Vol. 1, pp. 227-232, 15-19 June 2003. |
| 110 | (637 kb) |
J. Engel, J. Chen, X. Wang, Z. Fan, C. Liu, and D. Jones, "Technology Development of Integrated Multi-modal and Flexible Tactile Skin for Robotics Applications," IEEE/RSJ International Conference on Intelligent Robots and Systems, Las Vegas, Vol. 3, pp. 2359-2364, Nevada, 27-31 October 2003. |
| 109 | (676 kb) |
J. Chen, Z. Fan, J. Engel, and C. Liu, "Towards Modular Integrated Sensors: The Development of Artificial Haircell Sensors Using Efficient Fabrication Methods," IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003), Las Vegas, Nevada, Vol. 3, pp. 2341-2346, 27-31 October 2003. |
| 108 | (779 kb) |
K. Ryu, K. Shaikh, and C. Liu, "Micro Magnetic Stir-Bars Integrated In Parylene Surface-Micromachined Channels For Mixing and Pumping," The Seventh International Conference on Miniaturized Chemical and Biochemical Analysis Systems (microTAS 2003), pp. 635-638, Squaw Valley, California, 5-9 Oct 2003 |
| 107 | (695 kb) |
K. Ryu, K. Shaikh, and C. Liu, "A Method To Monolithically Integrate Elastomer O-rings on Parylene Membranes For Improved Valve Sealing," The Seventh International Conference on Miniaturized Chemical and Biochemical Analysis Systems (microTAS 2003), pp. 343-346, Squaw Valley, California, 5-9 Oct 2003 |
| 106 | (867 kb) |
K. Shaikh, K. Ryu, Z. Fan, and C. Liu, "Fabrication of Through-Wafer Fluid Interconnects with Low Dead Volume and Integrated Back-Plane Fluid Jumpers," The Seventh International Conference on Miniaturized Chemical and Biochemical Analysis Systems (microTAS 2003), pp. 1053-1056, Squaw Valley, California, 5-9 Oct 2003. |
| 105 | (524 kb) |
X. Wang, K. Ryu, D. Bullen, J. Zou, H. Zhang, C. A. Mirkin, and C. Liu, "Scanning Probe Contact Printing," Langmuir, Vol. 19, No. 21, pp. 8951-5, 14 October 2003. |
| 104 | |
C. Liu, J. Chen, J. Engel, J. Zou, X. Wang, Z. Fan, K. Ryu, K. Shaikh, and D. Bullen, "Polymer micromachining and applications in sensors, microfluidics, and nanotechnology," The 226th National Meeting of the American Chemical Soceity (ACS), New York, NY, 11-17 Sept 2003. Available in Polymer Reprints, Vol. 44, No. 2, pp. ?-?, 2003. |
| 103 | (534 kb) |
J. Engel, J. Chen, and C. Liu, "A Polymer-Based MEMS Multi-Modal Sensory Skin," The 226th National Meeting of the American Chemical Soceity (ACS), New York, NY, 11-17 Sept 2003. Available in Polymer Reprints, Vol. 44, No. 2, pp. 534-5, 2003. |
| 102 | (478 kb) |
X. Wang, J. Engel, and C. Liu, "Liquid Crystal Polymer (LCP) for MEMS: Processes and Applications," Journal of Micromechanics and Microengineering, Vol. 13, No. 5, September 2003. |
| 101 | (820 kb) |
X. Wang, L. Vincent, M. Yu, Y. Huang, and C. Liu, "Architecture of a Three-Probe MEMS Nanomanipulator with Nanoscale End-Effectors," Proceedings of the 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2003), Kobe, Japan, pp. 891-896, 20-24 July 2003. |
| 100 | (433 kb) |
J. Zou, D. Bullen, X. Wang, C. Liu, and C. Mirkin, "Conductivity-based contact sensing for probe arrays in dip-pen nanolithography," Applied Physics Letters, Vol. 83, No. 3, 21 July 2003. |
| 99 | |
S. Lee, W. Sutomo, C. Liu, and E. Loth, "MEMS-based electrolytic microbubbler in a water channel," Proceedings of 4th ASME/JSME Joint Fluids Engineering Conference, Symposium on Microbubble and Polymer Friction Drag Reduction, Honolulu, Hawaii, Vol. 2A, pp. 655-664, 6-10 July 2003. |
| 98 | (342 kb) |
J. Engel, J. Chen, and C. Liu, "Development of Polyimide Flexible Tactile Sensor Skin," Journal of Micromechanics and Microengineering, Vol. 13, No. 3, pp. 359-366, May 2003. |
| 97 | (1283 kb) |
J. Engel, J. Chen, and C. Liu, "Development of a Multi-Modal, Flexible Tactile Sensing Skin Using Polymer Micromachining," The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Vol. 2, Boston, MA, 8-12 June 2003. |
| 96 | (1403 kb) |
J. Chen, J. Engel, and C. Liu, "Development of Polymer-Based Artificial Haircell Using Surface Micromachining and 3D Assembly," The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Vol. 2, Boston, MA, 8-12 June 2003. |
| 95 | (1697 kb) |
X. Wang, K. Ryu, D. Bullen, J. Zou, C. Mirkin, and C. Liu, "Scanning Probe with Elastomeric (PDMS) Tip for Scanning Probe Microcontact Printing(SP-µCP)," The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Vol. 2, Boston, MA, 8-12 June 2003. |
| 94 | (1817 kb) |
J. Zou, C. Liu, D. Trainor, J. Chen, J. Schutt-Ainé, and P. Chapman, "Development of Three-Ddimensional Inductors using Plastic Deformation Magnetic Assembly (PDMA)," IEEE Transactions on Microwave Theory and Techniques, Vol. 51, No. 4, April 2003. |
| 93 | (2427 kb) |
J. Chen, Z. Fan, J. Zou, J. Engel, and C. Liu, "Two Dimensional Micromachined Flow Sensor Array for Fluid Mechanics Studies," Journal of Aerospace Engineering, Vol. 16, No. 2, pp. 85-97, pp. 1067-1075, April 2003. |
| 92 | (1164 kb) |
J. Chen, J. Zou, C. Liu, J. Schutt-aine, and S.-M. Kang, "Design and Modeling of a Micromachined High-Q Tunable Capacitor WIth Large Tuning Range and a Vertical Planar Planar Inductor," IEEE Transactions on Electron Devices, Vol. 50, No. 3, pp. 730-739, March 2003. |
| 91 | (327 kb) |
J.C. Langer, J. Zou, C. Liu, and J.T. Bernhard, "Micromachined Reconfigurable Out-Of-Plane Microstrip Patch Antenna Using MEMS Plastic Deformation Magnetic Actuation," IEEE Microwave and Wireless Components Letters, Vol. 13, No. 2, pp. 120-122, March 2003. |
| 90 | (1205 kb) |
W. Sutomo, X. Wang, D. Bullen, S. Braden, C. Liu, "Development of An End-Point Detector for Parylene Deposition Process," Journal of Microelectromechanical Systems, Vol. 12, No. 1, pp. 64-69, February 2003. |
| 89 | (7890 kb) |
D. Bullen, X. Wang, J. Zou, S. Hong, S. Chung, K. Ryu, Z. Fan, C. Mirkin, C. Liu, "Micromachined Arrayed Dip Pen Nanolithography Probes for Sub-100 nm Direct Chemistry Patterning," Proceedings of 16th IEEE International Micro Electro Mechanical Systems Conference, MEMS 2003, Kyoto, Japan, 19-23 January 2003. |
| 88 | (599 kb) |
W. Sutomo, X. Wang, D. Bullen, S. Braden, C. Liu, "An In-situ End-Point Detector for Parylene CVD Deposition," Proceedings of 16th IEEE International Micro Electro Mechanical Systems Conference, MEMS 2003, Kyoto, Japan, 19-23 January 2003. |
| 2002 | ||
| 87 | (857 kb) |
D. Bullen, S. Chung, X. Wang, J. Zou, C. Liu, and Chad Mirkin, "Development of Parallel Dip Pen Nanolithography Probe Arrays for High Throughput Nanolithography," (Invited) Symposium LL: Rapid Prototyping Technologies, Materials Research Society Fall Meeting, Boston, MA, Proceedings of the MRS, Vol. 758, pp. LL4.2.1-LL4.2.10, 2-6 December 2002. |
| 86 | (409 kb) |
J. Engel, J. Chen, B. Flachsbart, J.C. Selby, M.A. Shannon, C. Liu, "Development of Polyimide-based Flexible Tactile Sensing Skin," Symposium D: Electronics on Unconventional Substrates-Electrotextiles and Giant-Area Flexible Circuits, Materials Research Society Fall Meeting, Boston, MA, Proceedings of the MRS, Vol. 736, pp. D4.5.1-D4.5.6, 2-6 December 2002. |
| 85 | |
C. Liu, J. Chen, J. Zou, and Z. Fan, "Three Dimensional PDMA Assembly: Design, Process, and Applications," The MEMS Symposium, 2002 ASME International Mechanical Engineering Congress and Exposition (IMECE 2002), New Orleans, LA, pp. 55-62, 17-22 November, 2002. |
| 84 | (257 kb) |
K. Ryu and C. Liu, "Precision Patterning of PDMS Thin Films: A New Fabrication Method and Its Applications," Sixth International Symposium on Micro Total Analysis System (mTAS), Nara, Japan, 3-7 November 2002. |
| 83 | (701 kb) |
K. Ryu, Z. Fan, and C. Liu, "Microfabrication Process for High-density Micro Pipette Array and Matching Multi-Well Plate with Mixers," Sixth International Symposium on Micro Total Analysis System (mTAS), Nara, Japan, 3-7 November 2002. |
| 82 | |
C. Liu, J. Zou, J. Chen, Z. Fan, F. Delcomyn, "Plastic Deformation Magnetic Assembly Method and Its Applications," 7th Symposium on Magnetic Materials, Processes and Devices, 202nd Electrochemical Society Meeting, Salt Lake City, UT, 20-25 October, 2002. |
| 81 | (309 kb) |
L-H Lu, K. Ryu, and C. Liu, "A Magnetic Microstirrer and Array for Microfluidic Mixing," IEEE Journal of Microelectromechanical Systems, Vol. 11, No. 5, pp. 462-469, October 2002. |
| 80 | (328 kb) |
J. Chen, S. Park, Z. Fan, G. Eden, C. Liu, "Development and characterization of micromachined hollow cathode plasma display devices," IEEE Journal of Microelectromechanical Systems, Vol. 11, No. 5, pp. 536-543, October 2002. |
| 79 | (632 kb) |
Z. Fan, J. Chen, J. Zou, D. Bullen, C. Liu, F. Delcomyn, "Design and Fabrication of Artificial Lateral-Line Flow Sensors," Journal of Micromechanics and Microengineering, Vol. 12, No. 5, pp. 655-661, September 2002. |
| 78 | (568 kb) |
X. Wang, J. Engel, J. Chen, and C. Liu, "Liquid Crystal Polymer Based MEMS Applications," 4th Advanced Technology Workshop on Packaging of MEMS and Related Micro Integrated Nano Systems, International Microelectronics and Packaging Society Symposium (IMAPS 2002), Denver, CO, 4-6 September, 2002. |
| 77 | (568 kb) |
X. Wang, D. Bullen, J. Zou, K. Ryu and C. Liu, S-W. Chung, and C. Mirkin, "Linear Probe Arrays for Dip-Pen Nanolithography," International Conference on Micro & Nano Systems (ICMNS 2002), Kunming, China, 11-14 August 2002 |
| 76 | (1599 kb) |
Z. Fan, J. Chen, J. Zou, J. Li, C. Liu, F. Delcomyn, "Development of Artificial Lateral-Line Flow Sensors," Proceedings of the Solid-state Sensors and Actuators Workshop, Hilton Head Island, June 2002. |
| 75 | (549 kb) |
M. Zhang, D. Bullen, S-W. Chung, S. Hong, K. Ryu, Z. Fan, C. Mirkin, C. Liu, "A MEMS nanoplotter with high-density parallel dip-pen nanolithography probe arrays," Nanotechnology, Vol. 13, pp. 212-217, April 2002. |
| 74 | (1695 kb) |
J. Li, Z. Fan, J. Chen, J. Zou, C. Liu, "High Yield Microfabrication Process for Biomimetic Artificial Haircell Sensors," Smart Electronics, MEMS, and Nanotechnology Conference (4700), SPIE's 9th Annual International Symposium on Smart Structures and Materials, 17-21 March 2002, San Diego, CA. |
| 73 | (1608 kb) |
D. Bullen, M. Zhang and C. Liu, "Thermal-Mechanical Optimization of Thermally Actuated Cantilever Arrays," Smart Electronics, MEMS, and Nanotechnology Conference (4700), SPIE's 9th Annual International Symposium on Smart Structures and Materials, San Diego, CA, 17-21 March 2002. |
| 72 | (831 kb) |
J. Chen, J. Zou and C. Liu, "A Surface Micromachined, Out-of-Plane Anemometer," Proceedings of MEMS 02, Las Vegas, NV, 2002. |
| 71 | (449 kb) |
C. Xu, W. Lemon, C. Liu, "Design and Fabrication of a High Density Metal Microelectrode Array for Neural Recording," Sensors and Actuators A, Vol. 96, Issue 1, pp. 78-85, January 2002. |
| 2001 | ||
| 70 | |
S.J. Park, J. G. Eden, J. Chen, C. Liu, and J. Ewing, "Arrays of silicon microsidcharge devices with multicomponent Dielectrics," Optics Letters, Vol. 26, No. 22, pp. 1773-1775, November 15, 2001. |
| 69 | (403 kb) |
S.J. Park, J. Chen, C.J. Wagner, N.P. Ostrom, C. Liu and J.G. Eden, "Microdischarge Arrays: A New Family of Photonic Devices," IEEE J. Selected Topics in Quantum Electronics, Vol. 8, No. 1, pp. 139-147, Jan/Feb 2001. |
| 68 | (102 kb) |
S.J. Park, J.G. Eden, J. Chen and C. Liu, "Independently addressable subarrays of silicon microdischarge devices: electrical characteristics of large (30x30) arrays and excitation of a phosphor," Appl. Phys. Lett., Vol. 79, No. 13, pp. 2100-02, 2001. |
| 67 | (636 kb) |
J. Zou, C. Liu and J. Schutt-aine, "Development of a Wide-Tuning-Range Two-Parallel-Plate Tunable Capacitor for Integrated Wireless Communication Systems," International Journal of RF and Microwave Computer Aided Engineering, Vol. 11, No. 5, pp. 322-329, Sept 2001. |
| 66 | (358 kb) |
M. Zhang, D. Bullen, K. Ryu, C. Liu, S. Hong, S. Chung, C. Mirkin "Passive and Active Probes for Dip Pen Nanolithography," First IEEE Conference on Nanotechnology, October 28-30, Maui, HI, 2001. |
| 65 | |
S. Hong, S. Chung, C. Mirkin, M. Zhang, D. Bullen, C. Liu, "Dip Pen Nanolithography MEMS Nanoplotter - A new tool capable of massive parallel patterning via passive and active probes," Gordon Research Conference: Clusters, Nanoparticles, and Nanocrystals, July 29-Aug 3, 2001. |
| 64 | |
C. Xu, W. Lemon, F. Delcomyn, C. Liu, "A Novel microelectrode Sensor Array for Simultaneous Multiunit Neural Recording," Society of Neuron Sciences 31st Annual Meeting, 2001. |
| 63 | |
L-H Lu, K. Ryu, C. Liu, "A Novel Microstirrer and Arrays for Microfluidic Mixing," Fifth International Conference on Miniaturized Chemical and Biochemical Analysis Systems, Oct 21-25, 2001. |
| 62 | (190 kb) |
J. Zou, J. Chen, C. Liu, Jose Schutt-Aine, "Plastic Deformation Magnetic Assembly (PDMA) of Out-Of-Plane Microstructures: Technology and Application," Journal of Microelectromechanical Systems, Vol. 10, No. 2, pp. 302-309, June 2001. |
| 61 | (1961 kb) |
J. Zou, J. Chen, C. Liu, "Plastic Deformation Magnetic Assembly (PDMA) of 3-D Microstructures: Technology Development and Application," Transducers 01, Paper 4C2.04, Munich, Germany, June 2001. |
| 60 | (723 kb) |
J. Chen, S.J. Park, J.G. Eden and C. Liu, "Microdischarge Device Fabricated in Silicon by Micromachining Technique with Pyramidal Cavity," Transducers 01, Paper 2C1.05P, Munich, Germany, 2001. |
| 59 | (782 kb) |
S.J. Park, J. Chen, C. Liu, J. Eden, "Microcavity Plasma Discharge Arrays For Display Applications," Symposium Information Display 2001 (SID 2001), pp. 775-777, June 2001. |
| 58 | (260 kb) |
S.J. Park, J. Chen, C. Liu, J.G. Eden, "Arrays of microdischarge devices having 50-100um square pyramidal Si anodes and screen cathodes," Electronics Letters, Vol 37, no. 3, pp.171-2, Feb 1, 2001. |
| 57 | (773 kb) |
S.J. Park, J. Chen, C. Liu, J. Eden, "Large scale microdischarge arrays: fabrication and characterization," CLEO, Optical Society of America, 2001. |
| 56 | (915 kb) |
J. Zou, J.G. Nickel, D. Trainor, C. Liu, J.E. Schutte-Aine, "Development of Vertical Planar Coil Inductors Using Plastic Deformation Magnetic Assembly(PDMA)," 2001 IEEE International Microwave Symposium, Pheonix, 20-25 May 2001. |
| 55 | |
L.H. Lu, X. Wang, C. Liu, "An efficient low-cost micro fabrication method of capillary electrophoresis chip using liquid crystal polymer (LCP)," L1006, 14th International Symposium on Microscale Separations and Analysis, Boston, MA, 13-18 January 2001. |
| 54 | (514 kb) |
M. Khoo, C. Liu, "Micro magnetic silicone elastomer membrane actuator," Sensors and Actuators, vol. 89, no. 3, pp. 259-266, March, 2001. |
| 53 | (725 kb) |
X. Wang, L.H. Lu, C. Liu, "Micromachining Techniques for Liquid Crystal Polymer," Proceedings of 14th IEEE Int. Micor Electro Mechanical Systems Conf., MEMS 2001, Switzerland, January, 2001. |
| 52 | (139 kb) |
S.-J. Park, J. Chen, C. Liu and J.G. Eden, "Silicon microdischarge devices having inverted pyramidal cathodes: Fabrication and performance of arrays", Applied Physics Letters, vol. 78, no. 4, pp 419-421, 22 Jan 2001. |
| 2000 | ||
| 51 | |
Z. Zhu and C. Liu, "Simulation of anisotropic crystalline etching using a continuous cellular automata algorithm," Journal Computer Modeling for Engineering and Science, Vol. 1, No. 1, pp. 11-19, 2000 |
| 50 | (508 kb) |
J. Zou, C. Liu, J. Schutt-Aine, Jinghong Chen, S. Kang, "Development of a Wide Tuning Range MEMS Tunable Capacitor for Wireless Communication Systems," International Electron Device Meeting, San Francisco, 2000. |
| 49 | (10 kb) |
J. Bernhard, N.W. Chen, R. Clark, M. Feng, C. Liu, P. Mayes, E. Michielssen, "Mechanically conformal and electronically reconfigurable apertures using low voltage MEMS and flexible membranes for space based radar applications," 2000 IEEE AP-S (Antenna Propagation) International Symposium, Salt Lake City, Utah, 16-21 July, 2000. |
| 48 | |
C. Liu, "A magnetic flexible membrane actuator for micro fluid pumping (Invited)," Sixth International Symposium on Magnetic Materials, Processes and Devices, a Symposium at the 198th Meeting of the Electrochemical Society, Phoenix, Arizona, 22-27 Oct 2000. |
| 47 | (264 kb) |
J. Zou, C. Liu, "Development of a Novel Micro Electromechanical Tunable Capacitor with a High Tuning Range," 58th Device Research Conference (DRC), June 19-21, Denver, CO, pp. 111-112, 2000. |
| 46 | (1203 kb) |
J. Zou, C. Liu, "Design of a Wide Tuning Range Micromachined Tunable Capacitor for Wireless Communications," First IEEE Electro/Information Technology, Conference, June 8-11, Chicago, IL, 2000. |
| 45 | |
C. Liu, "Miniaturization and MEMS technology, in Automation, Miniature Robotics and Sensors for Nondestructive Evaluation and Testing," Yoseph Bar-Cohen, Technical Editor, ASNT, 2000. |
| 44 | (256 kb) |
M. Khoo, C. Liu, "Development of A Novel Micromachined Magnetostatic Membrane Actuator," The 58th Annual IEEE Device Research Conference, pp. 109-110, Denver, CO, 2000. |
| 43 | (399 kb) |
M. Khoo, C. Liu, "A Novel Micromachined Magnetic Membrane Microfluid Pump," 22nd Annual International Conference of the IEEE Engineering in Medicine and Biology Society, Chicago, IL, 2000. |
| 42 | (266 kb) |
D. Armani, C. Liu, "Microfabrication technology for polycaprolactone, a biodegradable polymer," Journal of Micromechanics and Microengineering, Vol. 10, pp. 80-84, 2000. |
| 41 | (945 kb) |
Z. Zhu, C. Liu, "Micromachining Process Simulation Using a Continuous Cellular Automata Method," Journal of Microelectromechanical Systems, Vol. 9, No. 2, pp. 252-61, June 2000 |
| 40 | (109 kb) |
J. Li, J. Chen and C. Liu, "Micromachined Biomimetic Sensor Using Modular Artificial Hair Cells," NanoSpace 2000, Houston, TX. |
| 39 | |
D. Armani, C. Liu, "Microfabrication Technology for Polycaprolactone, A Biodegradable Polymer," Proceedings of 13th IEEE Int. Micor Electro Mechanical Systems Conf., MEMS 2000, Japan. |
| 1999 | ||
| 38 | |
G. Barbastathis, M. Balberg, D. Brady, B. Choi, and C. Liu, "Holographic 3D imaging of microstructures," SPIE International symposiumon optical science, engineering and instrumentation, Denver, Colordo, pp. 3801-23, July 1999. |
| 37 | |
C. Liu, Y.C. Tai, "Sealing of micromachined cavities using chemical vapor deposition methods: characterization and optimization," IEEE J. MEMS, Vol. 8, No. 2, pp. 135-145, June 1999. |
| 36 | |
Z. Zhu and C. Liu, "Simulation of anisotropic crystalline etching using a continuous cellular automata algorithm," Journal Computer Modeling for Engineering and Science, Vol. 1, No. 1, pp. 11-19, 2000. |
| 35 | (328 kb) |
J. Zou, M. Balberg, C. Byrne, C. Liu, D. Brady, "Optical Properties of Surface Micromachined Mirrors with Etch Holes", Journal of Microelectromechanical Systems, Vol. 8, No. 4, pp. 506-513, Dec 1999. |
| 34 | (422 kb) |
B. Choi, M. Ma, C. White, C. Liu, "Electrolytic and thermal bubble generation using AC inductive powering," International Conference on Solid-State Sensors and Actuators (Transducer'99), Sendai, Japan, 7-10 June 1999. |
| 33 | (782 kb) |
Y. Yi and C. Liu, "Assembly of micro optical devices using magnetic actuation," International Conference on Solid-State Sensors and Actuators (Transducers 99), Sendai, Japan, 7-10 June 1999. |
| 32 | (459 kb) |
C. Liu, T. Tsao, V. Lee, J. Lu, Y. Yi, Y.C. Tai, C.M. Ho, "Out of plane magnetic actuators with electroplated Permalloy for fluid dynamic control," J. Sensors and Actuators, Vol. 78, Issue 2-3, pp. 190-97, 1999. |
| 31 | |
Y. Yi and C. Liu, "Assembly of micro optical devices using magnetic actuation," J. Sensors and Actuators, Vol. 78, Issue 2-3, pp. 205-11, 1999. |
| 30 | (1019 kb) |
C. Liu and Y. Yi, "Micromachined Magnetic Actuators Using Electroplated Permalloy," IEEE Transactions on Magnetics, Vol. 35, No. 3, pp. 1976-85, May 1999. |
| 29 | (53 kb) (146 kb) |
C. Liu, T. Tsao, and Y.C. Tai, "A High Yield Drying Process for Surface-micromachined Structures Using Magnetostatic Forces," Journal of Sensors and Materials, Vol. 11, No. 2, pp. 71-86, 1998. |
| 28 | (306 kb) |
C. Liu, J. Huang, Z. Zhu, F. Jiang, S. Tung, Y.C. Tai, and C.M. Ho, "A Micromachined Flow Shear-stress Sensor Based on Thermal Transfer Principles," Journal of MEMS, Vol. 8, No. 1, pp.90-99, 1999. |
| 27 | (595 kb) |
D. Armani, C. Liu, "Re-configurable Fluid Circuits By PDMS Elastomer Micromachining," 12th International Conference on MEMS, MEMS 99, pp.222-227, Orland, FL, 1998. |
| 26 | (434 b) |
Yong Yi and Chang Liu, "Magnetic Actuation of Hinged Microstructures," Journal of MEMS, Vol. 8, No. 1, pp.10-17, March 1999. |
| 25 | |
T. Tsao, F. Jiang, C. Liu, R. Miller, S. Tung, J.B. Huang, B. Gupta, D. Bebcock, C. Lee, Y.C. Tai, C.M. Ho, J. Kim, R. Goodman, "MEMS based active drag reduction in turbulent boundary layer," Chapter 14, Microengineering Aerospace Systems (Henry Helvajian, Ed.), pp. 553-580, the Aerospace Press, 1999. |
| 1998 | ||
| 24 | |
1. C. Liu, T. Tsao, and Y.C. Tai, "A High Yield Drying Process for Surface-micromachined Structures Using Magnetostatic Forces," Journal of Sensors and Materials, Vol. 11, No. 2, pp. 71-86, 1998. |
| 23 | (335 kb) |
J. Zou, C. Byrne, C. Liu, and D. Brady, "Optical Properties of Micromachined Polysilicon Reflective Surfaces with Etching Holes," SPIE's Micromachining and Microfabrication, Santa Clara, CA, Sep 1998. |
| 22 | (342 kb) |
Y. Yi and C. Liu, "High-Yield Assembly of Hinged 3D Optical MEMS Devices Using Magnetic Actuation," SPIE's Micromachining and Microfabrication, Santa Clara, CA, Sep 1998. |
| 21 | (257 kb) |
C. Liu, "Micro Electromechanical Systems (MEMS): Technology and future applications in circuits," Proceedings if the 1998 5th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 98, Beijing, 21-23 Oct 1998. |
| 20 | |
Z. Zhu and C. Liu, "An efficient PC-based preferential-etch simulator using dynamic cellular automata method," Int. Conf. on Solid-state IC Technology, ICSICT 98, Beijing, Oct 1998. |
| 19 | (kb) |
Y. Yi and C. Liu, "Mechanically stable micro assembly using magnetostatic actuation," Int. Conf. on Solid-state IC Technology, ICSICT 98, Beijing, Oct 1998. (Winner, Conference Best Paper Award sponsored by the Applied Materials Inc.) |
| 18 | (33 kb) (249 kb) |
C. Liu and R. Gamble, "Mass producible monolithic silicon probes for scanning probe microscopes," J. Sensors and Actuators, A. Physical, Vol. 71, no.3, pp. 233-237, 1998. |
| 17 | (313 kb) |
Z. Zhu and C. Liu, "Anisotropic Crystalline Etching Simulation using a Continuous Cellular Automata Algorithm," ASME Symposium on Computer Aided Simulation of MEMS, Aneheim, CA, Nov 1998. |
| 16 | (68 kb) (196 kb) |
C. Liu, "Development of Surface Micromachined Magnetic Actuators using Electroplated Permalloy," Journal of Mechatronics, pp.613-633, 1998. |
| 15 | (5221 kb) |
Y. Yi and C. Liu, "Parallel assembly of hinged microstructures using magnetic actuation," IEEE solid-state sensors and actuators workshop, Hilton Head Island, SC, pp.269-272, 1998. |
| 14 | (8 kb) |
C. Liu, "Silicon micromachined magnetic actuators for interaction with strong and dynamic air flow," U.S. National Congress of Applied Mechanics, Florida, USA, June, 1998. |
| 13 | |
C. Liu, "Application of MEMS in Optical and RF Communications," Motorola Conference on Design and Simulation, Phoniex, AZ, June 1998. |
| 12 | (158 kb) |
C. Liu, "Through-wafer electrical interconnects by sidewall photo-lithography patterning," International Measurement Technology Conference, St. Paul, MN, pp. 1402-1405, May, 1998. |
| 11 | |
C. Liu, Y.C. Tai, "Monolithic, mass-producible silicon probes for scanning probe microscopy," IMTC, St. Paul, MN, pp. 1381-1384, May 1998. |
| 1997 | ||
| 10 | (54 kb) (145 kb) |
C. Liu, T. Tsao, Y.C. Tai, "A High Yield Drying/Release Process for Surface Micromachined Polysilicon Structures," Transducer'97, Chicago, IL, pp. 241-244, June 1997. |
| 1996 | ||
| 9 | (558 kb) |
J.B. Huang, S. Tung, C.M. Ho, C. Liu and Y.C. Tai, "Improved Micro Thermal Shear-Stress Sensor," IEEE Transactions on Instrumentation and Measurement, Vol. 45, No. 2, pp. 570-574, April 1996. |
| 8 | |
G.B. Lee, C.M. Ho, F.K. Jiang, C. Liu, T. Tsao, Y.C. Tai, "Distributed Flow Control by MEMS," ASME Annual Meeting, 1996. |
| 7 | |
I. Vasic, C. Liu, F. A. Khan, M. A. Shannon, M. Q. Brewster, "HTPB Melt Layer Viscosity Using Plate Wave Microsensors," 33rd JANNAF Combustion Meeting, Monterey, CA, 4-7 Nov 1996. |
| 1995 | ||
| 6 | |
C. Liu, T. Tsao, P. Will, Y.C. Tai and W.H. Liu, "A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems," Proceedings of the 1995 International Conference on Solid-State Sensors and Actuators, Transducer '95, Sweden, 1995. |
| 5 | |
C. Liu, T. Tsao, Y.C. Tai, J. Leu, C.M. Ho, W.L. Tang and D.K. Miu, "Out-Of-Plane Permalloy Magnetic Actuators," Proceedings of the IEEE Workshop on Micro-Electro-Mechanical Systems, MEMS '95, the Netherlands, pp. 7-12, 1995. |
| 1994 | ||
| 4 | |
C. Liu, T. Tsao, Y.C. Tai and C.M. Ho, "Surface Micro-machined Magnetic Actuators," Proceedings, IEEE Workshop on Micro-Electro-Mechanical-Systems, MEMS'94, Oiso, Japan, pp. 57-62, 1994. |
| 3 | |
T. Tsao, C. Liu, Y.C. Tai and C.M. Ho, "Micro Magnetic Actuators for Active Fluid Control," the First ASME Symposium on Application of Micro-Fabrication to Fluid Mechanics, Chicago, IL, pp. 31-38, 1994. |
| 2 | (333 kb) |
C. Liu, Y.C. Tai, J.B. Huang and C.M. Ho, "Surface Micromachined Thermal Shear Stress Sensor," the First ASME Symposium on Application of Micro-Fabrication to Fluid Mechanics, Chicago, IL, pp. 9-15, November 1994. |
| 1 | (201 kb) |
C. Liu and Y.C. Tai, "Studies on the Sealing of Surface Micro-machined Cavities by Using Chemical Vapor Deposition Methods," 5th IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, pp. 103-106, 1994. |