Micro Nano Technology Research Group
UIUC Homepage
Department of Electrical and Computer Engineering University of Illiniois at Urbana-Champagin

Saturday, May 17, 2008

MNTR Research Focus Slide Show

1 Intro | 2 | 3 | 4 | 5 | 6 | 7 | 8

MNTR Research Focus

High Sensitivity Flow Sensor

The artificial haricell sensors can function as high performance flow sensors, especially arrayed flow sensors.  We have demonstrated a flow sensor capable of detecting in-plane flow of less than 1 mm/s velocity with 360 degrees omnidirectional sensing.