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Parylene Deposition Thickness Monitor
A Parylene deposition sensor. The sensor consists of a serpentine heater on a suspended platform (right) and a thin temperature sensing bridge (left) that are separated by gap of known width. When the deposition begins, the vacuum separating the two impedes heat transfer. Once the Parylene thickness reaches half the width of the gap, it will bridge the gap and the heat transfer will increase. The increase is detected as change in sensor resistivity.
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