Micro Nano Technology Research Group
UIUC Homepage
Department of Electrical and Computer Engineering University of Illiniois at Urbana-Champagin

Saturday, May 17, 2008

MNTR Research Focus Slide Show

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MNTR Research Focus

Active Probes

We have also built active Scanning Probe Microscope (SPM) probes for active dip pen nanolithography (DPN) writing.  Each probe can be displaced independently based on a variety of principles, such as the thermal bimetallic actuation principle.  We have successfully used the active probe to create different patterns from individual probes while the array follows a common path.