Micro Nano Technology Research Group
UIUC Homepage
Department of Electrical and Computer Engineering University of Illiniois at Urbana-Champagin

Saturday, May 17, 2008

MNTR Research Focus Slide Show

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MNTR Research Focus

Scanning Probe Contact Printing

We have increased the functionality of Scanning Probe Microscope (SPM) probes by introducing new tip materials.  Traditional SPM tips are made of metals, semiconductors, of oxide and nitride materials.  We have developed a new probe with the tip being soft elastomer (e.g., PDMS).  The shank of the probe is a mode of an inorganic material.