Micro Nano Technology Research Group
UIUC Homepage
Department of Electrical and Computer Engineering University of Illiniois at Urbana-Champagin

Tuesday, July 08, 2008

MNTR Research Focus Slide Show

1 Intro | 2 | 3 | 4 | 5 | 6 | 7 | 8

MNTR Research Focus

Soft MEMS by Nanocomposite Material

Nanocomposite materials such as conductive elastomer made by doping elastomers with conductive particles (e.g., carbon black and carbon nanotubes) are being integrated into microscale devices in our group.  Here we demonstrate a multilayer 3D PDMS structure and application as a stretchable tactile sensor.