Micro Nano Technology Research Group
UIUC Homepage
Department of Electrical and Computer Engineering University of Illiniois at Urbana-Champagin

Tuesday, July 08, 2008

MNTR Research Focus Slide Show

1 Intro | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 | 14 | 15

MNTR Research Focus

Active Probes

We have also built active Scanning Probe Microscope (SPM) probes for active dip pen nanolithography (DPN) writing.  Each probe can be displaced independently based on a variety of principles, such as the thermal bimetallic actuation principle.  We have successfully used the active probe to create different patterns from individual probes while the array follows a common path.