Micro Nano Technology Research Group
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Department of Electrical and Computer Engineering University of Illiniois at Urbana-Champagin

Tuesday, July 08, 2008

MNTR Research Focus Slide Show

1 Intro | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 | 14 | 15

MNTR Research Focus

Artificial Haircell

We have been building artificial haircells using MEMS technology since 1998.  We have two families of artificial haircells, one is based on traditional MEMS material such as silicon and one is based on polymers.  The polymer material provides greater robustness than silicon.  We focus on sensing of flow, vibration, and acoustics.

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