Micro Nano Technology Research Group
UIUC Homepage
Department of Electrical and Computer Engineering University of Illiniois at Urbana-Champagin

Tuesday, July 08, 2008

MNTR Research Focus Slide Show

1 Intro | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 | 14 | 15

MNTR Research Focus

High Sensitivity Flow Sensor

The artificial haricell sensors can function as high performance flow sensors, especially arrayed flow sensors.  We have demonstrated a flow sensor capable of detecting in-plane flow of less than 1 mm/s velocity with 360 degrees omnidirectional sensing.