Micro Nano Technology Research Group
UIUC Homepage
Department of Electrical and Computer Engineering University of Illiniois at Urbana-Champagin

Tuesday, July 08, 2008

MNTR Research Focus Slide Show

1 Intro | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 | 12 | 13 | 14 | 15

MNTR Research Focus

Scanning Probe: Access to Nano

Nanofabrication technology will lead to new devices and capabilities for semiconductor, life science, and medical applications.  We are building advanced scanning probes for nanofabrication.  The scanning probe microscope (SPM) instrument is one of the most intriguing scientific instruments, capable of access the nano world.